Abstract
Purpose - This paper reports the dynamic analysis and design for micro pressure sensor. By using a cross beam-membrane (CBM), the sensor can measure dynamic pressure and work more effectively in a high frequency range compared with other piezoresistive structures. Experimental results show that the nature frequency of pressure sensors is above 30 kHz, much higher than the existing designs in literatures. Design/methodology/approach - 1. The cross beam-membrane (CBM) structure for piezoresistive micro pressure sensor is proposed, modeled and simulated. 2. The resonance frequency is enhanced and the CBM nature frequency is 41643Hz, which exceeds almost 11000Hz to flat membrane and 18000 to the single island. 3. The micro pressure sensors are fabricated and tested. Their characteristics are compared. 4. The experimental results show the cross beam-membrane structure has a high resonance frequency according to the simulation result. Findings - Simulations and experiments results suggest that the CBM structure has stable dynamic performance, and it is a better choice for measuring dynamic micro pressure in the field of biomedical application, especially, for the implanted intracranial pressure measurement. Originality/value - This paper established the CBM structure for micro pressure mearsurement, and simulated the dynamic performance of this sensor. Comparison between the traditional structures and the CBM proves the new structure has the advantage of high resonant frequency. Finally, the experimental results are carried out and analyzed, including the tube effect on the dynamic response .
Purpose - This paper reports the dynamic analysis and design for micro pressure sensor. By using a cross beam-membrane (CBM), the sensor can measure dynamic pressure and work more effectively in a high frequency range compared with other piezoresistive structures. Experimental results show that the nature frequency of pressure sensors is above 30 kHz, much higher than the existing designs in literatures. Design/methodology/approach - 1. The cross beam-membrane (CBM) structure for piezoresistive micro pressure sensor is proposed, modeled and simulated. 2. The resonance frequency is enhanced and the CBM nature frequency is 41643Hz, which exceeds almost 11000Hz to flat membrane and 18000 to the single island. 3. The micro pressure sensors are fabricated and tested. Their characteristics are compared. 4. The experimental results show the cross beam-membrane structure has a high resonance frequency according to the simulation result. Findings - Simulations and experiments results suggest that the CBM structure has stable dynamic performance, and it is a better choice for measuring dynamic micro pressure in the field of biomedical application, especially, for the implanted intracranial pressure measurement. Originality/value - This paper established the CBM structure for micro pressure mearsurement, and simulated the dynamic performance of this sensor. Comparison between the traditional structures and the CBM proves the new structure has the advantage of high resonant frequency. Finally, the experimental results are carried out and analyzed, including the tube effect on the dynamic response .